JPH0290665U - - Google Patents
Info
- Publication number
- JPH0290665U JPH0290665U JP17158988U JP17158988U JPH0290665U JP H0290665 U JPH0290665 U JP H0290665U JP 17158988 U JP17158988 U JP 17158988U JP 17158988 U JP17158988 U JP 17158988U JP H0290665 U JPH0290665 U JP H0290665U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- opening
- target
- sputtering
- closing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17158988U JPH0290665U (en]) | 1988-12-28 | 1988-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17158988U JPH0290665U (en]) | 1988-12-28 | 1988-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0290665U true JPH0290665U (en]) | 1990-07-18 |
Family
ID=31463553
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17158988U Pending JPH0290665U (en]) | 1988-12-28 | 1988-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0290665U (en]) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5665981A (en) * | 1979-11-02 | 1981-06-04 | Hitachi Ltd | Sputtering device |
| JPS60262969A (ja) * | 1984-06-11 | 1985-12-26 | Tdk Corp | スパツタタ−ゲツト装置 |
-
1988
- 1988-12-28 JP JP17158988U patent/JPH0290665U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5665981A (en) * | 1979-11-02 | 1981-06-04 | Hitachi Ltd | Sputtering device |
| JPS60262969A (ja) * | 1984-06-11 | 1985-12-26 | Tdk Corp | スパツタタ−ゲツト装置 |